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HALO KA H2O

Categories: Gases, Process, Specialised Products,
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An analytical solution that’s right on time

The HALO KA H2O packs a punch in one all-included compact and affordable package. Using Tiger Optics’ renowned time-based technology—Continuous Wave Cavity Ring-Down Spectroscopy—you can verify moisture impurity levels down to 100 ppt in helium, with drift-free stability and virtually instant response. You’ll find our system exceptionally fast to install, easy to use and effortless to maintain, with built-in zero verification. The HALO KA H2O specializes in trace-level moisture detection in bulk gases and specialty gases, as well as gas mixtures, including germane (GeH4) in hydrogen and other specialty mixtures used in semiconductor manufacturing. Pair the HALO KA H2O with the HALO OK for ppt level oxygen measurement to enjoy the benefits of laser-based technology for both of these critical contaminants.

Compact, affordable and powerful, the HALO KA H2O brings you:

  • Parts per trillion (ppt) moisture detection capability in an array of gases
  • Small footprint (two HALO KAs fit in a 19” rack)
  • Absolute measurement (freedom from calibration)
  • Low cost of ownership and great ease of use
  • Wide dynamic range—over four orders of magnitude
  • Clean technology

Applications

  • High-Purity Gases & Systems
  • Research & Development

Industries

Laboratory & Scientific

Stack, Process & CEMS

Detection Capability

Detection and Matrix Range LDL (3σ) Precision (1σ) @ zero
H2O in N2 0 – 20 ppm 300 ppt 100 ppt
H2O in He 0 – 4 ppm 100 ppt 20 ppt
H2O in Ar 0 – 9 ppm 130 ppt 45 ppt
H2O in H2 0 – 16 ppm 200 ppt 70 ppt
H2O in O2 0 – 10 ppm 150 ppt 50 ppt
H2O in Clean Dry Air (CDA) 0 – 18 ppm 300 ppt 100 ppt
H2O in CO 0 – 24 ppm 600 ppt 200 ppt
H2O in CO2 0 – 25 ppm 800 ppt 300 ppt
H2O in 1% GeH4/99% H2 0 – 16 ppm 7 ppb 2.5 ppb
H2O in 10% GeH4/90% H2 0 – 16 ppm 35 ppb 12 ppb
H2O in COS 0 – 23 ppm 4 ppb 1.4 ppb
H2O in Ne 0 – 5 ppm 100 ppt 30 ppt
H2O in Kr 0 – 11 ppm 160 ppt 60 ppt
H2O in Xe 0 – 13 ppm 250 ppt 90 ppt
H2O in Cl2 0 – 25 ppm
(corrosion-resistant material recommended)
650 ppt 220 ppt
H2O in HCl 0 – 50 ppm
(corrosion-resistant material recommended)
1200 ppt 400 ppt
H2O in HBr 0 – 50 ppm
(corrosion-resistant material required)
12 ppb 4 ppb
H2O in SF6 0 – 15 ppm 400 ppt 140 ppt
H2O in NF3 0 – 20 ppm 600 ppt 200 ppt
H2O in CF4 0 – 15 ppm 800 ppt 300 ppt
H2O in C2F6 0 – 15 ppm 1200 ppt 400 ppt
H2O in C3F8 0 – 20 ppm 1200 ppt 400 ppt
H2O in C4F8 0 – 20 ppm 1200 ppt 400 ppt
H2O in C5F8 0 – 32 ppm 8 ppb 3 ppb

Specifications

Performance
Operating range See Detection Capability table
Detection limit (LDL, 3σ/24h) See Detection Capability table
Precision (1σ, greater of) ± 0.75% or 1/3 of LDL
Accuracy (greater of) ± 4% or LDL
Speed of response < 3 minutes to 95%
Environmental conditions 10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature -10°C to 50°C
Gas Handling System and Conditions
Wetted materials 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish
Gas connections 1/4” male VCR inlet and outlet
Leak tested to 1 x 10-9 mbar l / sec
Inlet pressure 10 − 125 psig (1.7 − 9.6 bara)
Flow rate 0.05 – 1.8 slpm
Sample gases Most inert, toxic, passive and corrosive matrices
Gas temperature Up to 60°C
Dimensions, H x W x D
Standard sensor 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)
Sensor rack (fits up to two sensors) 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm)
Weight
Standard sensor 28 lbs (12.7 kg)
Electrical
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 − 240 VAC, 50/60 Hz
Power consumption 40 Watts max.
Signal output Isolated 4−20 mA per sensor
User interfaces 5.7” LCD touchscreen, 10/100 Base-T Ethernet, RS-232
802.11g Wireless (optional), Modbus TCP (optional)
Certification CE Mark
Patents
U.S. Patent #7,277,177

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