Products
Enabling Ultimate Moisture Detection Performance in Semiconductor Manufacturing
The HALO KA Max excels in trace-level H2O detection in bulk gases and specialty gases used in semiconductor manufacturing.
With the HALO KA Max, users can verify moisture impurity levels down to 100 ppt in semi bulk gases, with drift-free stability and virtually instant response to moisture upsets.
The HALO KA Max, based on Tiger Optics’ latest platform, offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification.
Pair the HALO KA Max with the HALO OK for ppt-level oxygen measurement to enjoy the benefits of advancements in laser-based technology for both of these critical contaminants.
Maximizing ultimate low-detection-level performance and speed of response, the HALO KA Max offers:
- Parts per trillion (ppt) moisture detection capability in an array of gases
- Absolute measurement (freedom from calibration)
- Field proven lowest Cost of Ownership and ease of use
- Wide dynamic range—over four orders of magnitude
- Unprecedented speed of response at sub-ppb H2O levels
- Compact footprint (two HALO KA Max fit in a 19” rack)
Applications
- High-Purity Gases & Systems
- Research & Development
Brand
Laboratory & Scientific
Stack, Process & CEMS
Detection Capability
| Detection and Matrix | Range | LDL* | Precision (1σ) @ zero |
|---|---|---|---|
| H2O in N2 | 0 – 5 ppm | 100 ppt | 40 ppt |
| H2O in He | 0 – 1 ppm | 100 ppt | 10 ppt |
| H2O in Ar | 0 – 2 ppm | 100 ppt | 20 ppt |
| H2O in H2 | 0 – 4 ppm | 100 ppt | 30 ppt |
| H2O in O2 | 0 – 2.5 ppm | 100 ppt | 20 ppt |
| H2O in CDA | 0 – 4 ppm | 100 ppt | 30 ppt |
| *The Detection limit (LDL) is defined as 3σ over 24h or the H2O drydown limit, whichever is higher |
Specifications
| Performance | |
|---|---|
| Operating range | See Detection Capability table |
| Detection limit (LDL)* | See Detection Capability table |
| Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
| Accuracy (greater of) | ± 4% or LDL |
| Speed of response | < 2 minutes to 95% |
| Environmental conditions | 10°C to 40°C, 30% to 80% RH (non-condensing) |
| Storage temperature | -10°C to 50°C |
| Gas Handling System and Conditions | |
| Gas connections | 1/4” male VCR inlet and outlet |
| Leak tested to | 1 x 10-9 mbar l / sec |
| Inlet pressure | 10 − 125 psig (1.7 − 9.6 bara) |
| Flow rate | 0.05 – 4 slpm |
| Sample gases | Most inert, toxic, and passive matrices |
| Gas temperature | Up to 60°C |
| Dimensions, H x W x D | |
| Standard sensor | 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm) |
| Sensor rack (fits up to two sensors) | 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm) |
| Weight | |
| Standard sensor | 28 lbs (12.7 kg) |
| Electrical | |
| Alarm indicators | 2 user programmable, 1 system fault, Form C relays |
| Power requirements | 90 − 240 VAC, 50/60 Hz |
| Power consumption | 40 Watts max. |
| Signal output | Isolated 4−20 mA per sensor |
| User interfaces | 5.7” LCD touchscreen, 10/100 Base-T Ethernet |
| USB, RS-232, RS-485 | |
| Data storage | Internal or external flash drive |
| Patents | |
| U.S. Patent #7,277,177 | |
| *The Detection limit (LDL) is defined as 3σ over 24h or the H2O drydown limit, whichever is higher |
|
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Bronwyn Straccione
Hi there, I'm Bronwyn. I've been with TES for 15 years and I'm the Category Manager for our Gasmet and CEMS equipment sales. My usual work days are Monday - Wednesday. If there's something I can help you with, please give me a call on 0404 161 353 or send me a message and myself or your local sales support will be in touch shortly!