HALO KA Max

Enabling Ultimate Moisture Detection Performance in Semiconductor Manufacturing

The HALO KA Max excels in trace-level H2O detection in bulk gases and specialty gases used in semiconductor manufacturing.

With the HALO KA Max, users can verify moisture impurity levels down to 100 ppt in semi bulk gases, with drift-free stability and virtually instant response to moisture upsets.

The HALO KA Max, based on Tiger Optics’ latest platform, offers exceptional speed and further improved usability in an all-inclusive and compact form factor. The analyzer is fast to install, easy to use and effortless to maintain, with built-in zero verification.

Pair the HALO KA Max with the HALO OK for ppt-level oxygen measurement to enjoy the benefits of advancements in laser-based technology for both of these critical contaminants.

Maximizing ultimate low-detection-level performance and speed of response, the HALO KA Max offers:

Parts per trillion (ppt) moisture detection capability in an array of gases
Absolute measurement (freedom from calibration)
Field proven lowest Cost of Ownership and ease of use
Wide dynamic range—over four orders of magnitude
Unprecedented speed of response at sub-ppb H₂O levels
Compact footprint (two HALO KA Max fit in a 19” rack)

Applications

High-Purity Gases & Systems
Research & Development

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Download Specifications

Brand

Laboratory & Scientific

Stack, Process & CEMS

Detection Capability

Detection and Matrix	Range	LDL*	Precision (1σ) @ zero
H₂O in N₂	0 – 5 ppm	100 ppt	40 ppt
H₂O in He	0 – 1 ppm	100 ppt	10 ppt
H₂O in Ar	0 – 2 ppm	100 ppt	20 ppt
H₂O in H₂	0 – 4 ppm	100 ppt	30 ppt
H₂O in O₂	0 – 2.5 ppm	100 ppt	20 ppt
H₂O in CDA	0 – 4 ppm	100 ppt	30 ppt
*The Detection limit (LDL) is defined as 3σ over 24h or the H₂O drydown limit, whichever is higher

Specifications

Performance
Operating range	See Detection Capability table
Detection limit (LDL)*	See Detection Capability table
Precision (1σ, greater of)	± 0.75% or 1/3 of LDL
Accuracy (greater of)	± 4% or LDL
Speed of response	< 2 minutes to 95%
Environmental conditions	10°C to 40°C, 30% to 80% RH (non-condensing)
Storage temperature	-10°C to 50°C
Gas Handling System and Conditions
Gas connections	1/4” male VCR inlet and outlet
Leak tested to	1 x 10^-9 mbar l / sec
Inlet pressure	10 − 125 psig (1.7 − 9.6 bara)
Flow rate	0.05 – 4 slpm
Sample gases	Most inert, toxic, and passive matrices
Gas temperature	Up to 60°C
Dimensions, H x W x D
Standard sensor	8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)
Sensor rack (fits up to two sensors)	8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm)
Weight
Standard sensor	28 lbs (12.7 kg)
Electrical
Alarm indicators	2 user programmable, 1 system fault, Form C relays
Power requirements	90 − 240 VAC, 50/60 Hz
Power consumption	40 Watts max.
Signal output	Isolated 4−20 mA per sensor
User interfaces	5.7” LCD touchscreen, 10/100 Base-T Ethernet
	USB, RS-232, RS-485
Data storage	Internal or external flash drive
Patents
U.S. Patent #7,277,177
*The Detection limit (LDL) is defined as 3σ over 24h or the H₂O drydown limit, whichever is higher

Enabling Ultimate Moisture Detection Performance in Semiconductor Manufacturing