Detect gas quality upsets before they can damage your processes. Using Tiger Optics’ LaserTrace 3 CH4, you can verify impurity levels with part-per-trillion accuracy, drift-free stability, and virtually immediate response. You’ll find our system exceptionally easy and fast to install, and effortless to maintain, with built-in zero verification. The LaserTrace 3 CH4 sensor detects trace methane to measurements ensure gases meet specifications or to alarm when critical processes are at risk, such as in silicon crystal manufacturing, where methane can alter wafer electrical properties. It measures in bulk gases, specialty gases, and gas mixtures. And its robust design – free of moving parts – results in an analyzer that has a high Mean Time Between Failure (MTBF) rate and a very low Cost of Ownership (CoO).
Detection and Matrix | Range | LDL (3σ) | Precision (1σ) @ zero |
---|---|---|---|
CH4 in N2 | 0 – 8 ppm | 0.8 ppb | 0.3 ppb |
CH4 in He | 0 – 5 ppm | 0.5 ppb | 0.2 ppb |
CH4 in Ar | 0 – 7 ppm | 0.7 ppb | 0.25 ppb |
CH4 in H2 | 0 – 8 ppm | 0.8 ppb | 0.3 ppb |
CH4 in O2 | 0 – 5 ppm | 0.5 ppb | 0.2 ppb |
Performance | |
---|---|
Operating range | See Detection Capability table |
Detection limit (LDL, 3σ/24h) | See Detection Capability table |
Precision (1σ, greater of) | ± 0.75% or 1/3 of LDL |
Accuracy (greater of) | ± 3% or LDL |
Speed of response | < 1 minute to 95% |
Environmental conditions | 10°C − 40°C, 30% − 80% RH (non-condensing) |
Storage temperature | -10°C − 50°C |
Gas Handling System and Conditions | |
Wetted materials | 316L stainless steel (optional corrosion-resistant material), 10 Ra surface finish |
Gas connections | 1/4” male VCR inlet and outlet |
Leak tested to | 1 x 10-9 mbar l / sec |
Sample inlet pressure | 30 − 125 psig (3.1 − 9.6 bara) |
Flow rate | 0.9 – 3.9 slpm (gas dependent) |
Sample gases | Most inert, toxic, passive and corrosive matrices |
Gas temperature | Up to 60°C |
Dimensions, H x W x D | |
Electronics unit | 14″ x 19″ x 14″ (356 mm x 483 mm x 356 mm) |
Standard sensor | 7″ x 4.75″ x 27″ (178 mm x 121 mm x 686 mm) |
Sensor rack (fits up to four standard sensors) | 8.75″ x 19″ x 27″ (222 mm x 483 mm x 686 mm) |
Weight | |
Electronics unit | 32 lbs (14.5 kg) |
Standard sensor | 38 lbs (17.2 kg) |
Electrical | |
Alarm indicators | User programmable setpoints (1 per sensor), Form C relays |
Power requirements | 90 − 240 VAC, 50/60 Hz |
Power consumption | 200 Watts max. |
Signal output | Isolated 4−20 mA per sensor |
User interfaces | 10.4” LCD touchscreen, PS/2 for mouse and keyboard |
User interfaces | 10/100 Base-T Ethernet, 2 USB ports, RS-232 |
Patents | |
U.S. Patent #7,277,177 |
Hi there, I'm Bronwyn. I've been with TES for 15 years and I'm the Category Manager for our Gasmet and CEMS equipment sales. My usual work days are Monday - Wednesday. If there's something I can help you with, please give me a call on 0404 161 353 or send me a message and myself or your local sales support will be in touch shortly!