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T-I Max HF

Categories: Gases, Process, Specialised Products,
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Next-Generation Trace Gas Analyzer for Detection & Continuous Monitoring of Hydrogen Fluoride (HF) Airborne Molecular Contaminants (AMCs) in Semiconductor Cleanrooms

You can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy Tiger Optics’ T-I Max HF analyzer to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays.

In today’s advanced semiconductor processing, the residual gases, vapors and chemicals emanating from the various materials, accelerated processing operations, and substrate storage and transport have become a critical concern. So much so that the International Technology Roadmap for Semiconductors (ITRS) now highlights AMC contamination as a key technical challenge in achieving and sustaining low defect rates on devices.

With a particular focus on the major contributors to the “chemical contamination” element of AMCs, the T-I Max HF analyzers, based on Tiger’s new global platform, can detect and continuously monitor HF with an unprecedented combination of sensitivity, selectivity, and speed of response.

Tiger Optics’ GO-cart for AMCs adds additional flexibility by providing a mobile platform that can be moved quickly to different critical monitoring points (see PDF brochure).

Based on Tiger Optics’ new global platform, the T-I Max HF monitor for Airborne Molecular Contaminants (AMC) delivers unprecedented performance, including:

  • Sensitive, absolute measurement technique, using Cavity Ring-Down Spectroscopy (CRDS)
  • Dramatically improved speed of response & parts-per-trillion detection limits
  • Drift-free, with calibration traceable to the world’s leading reference labs
  • Lowest Cost of Ownership—maintenance-free

Applications

  • Airborne Molecular Contaminants
  • Research & Development

Industries

Laboratory & Scientific

Stack, Process & CEMS

Detection Capability

Detection and Matrix Range LDL (3σ@100s) Speed of Response @ 20 ppb
HF in Cleanroom Air 0 – 1 ppm 20 ppt < 3 minutes

Specifications

Performance
Operation range See Detection Capability table
Detection limit (LDL, 3σ@100s) See Detection Capability table
Precision (1σ@100s, greater of) ± 0.5% or 1/3 of LDL
Accuracy (greater of) ± 4% or 2x LDL
Speed of response @ 20 ppb (T10/90+T90/10) See Detection Capability table
Environmental conditions 10°C to 40°C, 10% to 90% RH (non-condensing)
Sample conditions 17°C to 23°C, 35% to 55% RH
Storage temperature -10° to 50°C
Gas Handling System and Conditions*
Wetted materials Optimized for ppt-level AMCs and fast speed of response
Gas connections 1/4″ PFA Swagelok® inlet & outlet
Inlet pressure 0 – 10 psig (1 – 1.7 bara)
Outlet pressure Vacuum (<10 Torr)
Flow rate ∼2 slpm @ 1 atm inlet pressure
Sample gases Cleanroom air, clean dry air (CDA) or N2
Gas temperature Up to 60°C
Dimensions
Standard sensor 8.73″ x 8.57″ x 23.6″ (222 mm x 218 mm x 599 mm)
Sensor rack 8.73″ x 19.0″ x 23.6″ (222 mm x 483 mm x 599 mm)
GO-cart 50″ x 23″ x 36″ (1270 mm x 584 mm x 914 mm)
Weight
Standard sensor 33 lbs (15 kg)
GO-cart 260 lbs (118 kg)
(excl. vacuum pump)
Electrical
Alarm indicators 2 user programmable, 1 system fault, Form C relays
Power requirements 90 – 240 VAC 50/60 Hz
Power consumption 40 Watts max. per sensor
Signal output Isolated 4–20 mA per sensor
User interfaces 5.7″ LCD touchscreen, 10/100 Base-T Ethernet
USB, RS-232, RS-485
Data storage Internal or external flash drive
Patents
U.S. Patent # 7,277,177
*Vacuum source with >2 slpm @ 10 Torr required

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