The trace gas analyzer is for low pressure chamber monitoring needs, it provides parts per billion H2O detection limits at very low pressures ( <50 Torr) for inert, toxic gases.

• Industry-leading parts-per-billion detection
• Unprecedented speed of response
• Widest available dynamic range
• Absolute measurement (freedom from calibration gases)
• Flexibility: up to four (4) measurement points per electronics module
• Extremely low cost of ownership

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