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Process

HALO 3 CH2O

Measurement of trace CH2O for diverse applications.

HALO 3 CO

PPB-Level Carbon Monoxide Detection for process control and quality control

HALO 3 CO2

Trace CO2 detection in nitrogen and other inert gases down to 8 ppb in nitrogen

HALO 3 H2O

Sub parts per billion (ppb) moisture detection capability in an array of gases

HALO 3 CH₄

Trace level methane gas analyzer for fixed bulk gas continuous quality control, process tool monitoring, air separation, gas cylinder quality control and silicon wafer manufacturing monitoring,

HALO 3 HCl

Trace-level HCl analyser with ow single-digit parts per billion (ppb) detection capability

HALO 3 NH3

Trace ammonia analysis in laboratory and process applications - sub-part-per-billion (ppb) detection limit

HALO 3 HF

Trace level hydrogen fluoride gas analyzer is ideally suited to applications where HF impurities are extremely critical

HALO H2

Low parts-per-billion (ppb) Hydrogen detection capability

Spark H2O

Trace Level Moisture Analyzer from single-digit ppb to 1000s of ppm

Spark CH4

CH4 analysis over a vast range: 6 ppb to 50 ppm (in O2)

Spark CO2

Trace monitoring of critical impurities in nitrogen and other pressurized gases.

Prismatic 3

detection of H₂O, CO, CO₂ and CH₄ from parts-per-billion to parts-per-million levels

T-I Max HCl

Detection and continuous monitoring of Hydrogen Chloride (HCl) Airborne Molecular Contaminants (AMCs) in Semiconductor Cleanrooms

T-I Max CEM

Measures for NH₃, HCl, HF, H₂S, CO, CH₄, and more for compliance and process control

HALO LP H2O

Low parts per billion (ppb) moisture detection capability in NH₃ and PH₃

HALO 3 N2O

Trace level nitrous oxide analysis - sub-parts-per-million (ppm) N2O detection capability

CO-rekt

Parts-per-billion CO analysis for Air Separation Units, Nitrogen Plants, High-Purity Gases & Systems and Syngas & Fuel Gas Production

HALO OK/OK+

Monitors oxygen impurity levels with part-per-trillion accuracy, drift-free stability and instantaneous response

HALO QRP

Moisture detection at partial pressure of 1 µTorr and below

HALO RP H2O

Trace level moisture analysis at reduced pressure conditions in inert, acid and hydride gases

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